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Journal paper
Entry Year2010
Journal levelSCI
Paper title (chapter)A pseudo 3D glass microprobe array: glass microprobe with embedded silicon for alignment and electrical interconnection during assembly
Name of journalJournal of Micromechanics and Microengineering
Date of publication2010-00-00
number of chapters20
Issue No.2
Name of author (Chinese)Shin- Rung Yeh
Name of author (English)Shin- Rung Yeh
AuthorsLee, Y.T., Lin, C.W., Lin, C.M., Yeh, S.R., Chang, Y.C. and Fang, W.
Author's typeOther
Language usedEnglish
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